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Fabrication of excimer laser annealed poly-Si thin film transistor by using an elevated temperature ion shower doping Park, SC; Jeon, DukYoung, THIN SOLID FILMS, v.310, no.1-2, pp.317 - 321, 1997-11 |
High-quality epitaxial growth of in situ phosphorus-doped Si films by promoting dispersion of native oxides in alpha-Si Kim, HS; Shim, KH; Lee, SY; Lee, JeongYong; Kang, JY, JOURNAL OF CRYSTAL GROWTH, v.212, no.3-4, pp.423 - 428, 2000-05 |
Low-temperature growth of in situ phosphorus-doped silicon films: two-step growth utilizing amorphous silicon buffers Shim, KH; Kim, HS; Lee, JeongYong; Kang, JY; Song, MK, THIN SOLID FILMS, v.369, no.1-2, pp.185 - 188, 2000-07 |
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