정밀 스캐너를 이용한 간섭 현미경의 가로방향 분해능 향상Improved lateral resolution of interferometric microscope using precision scanner

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An interferometric microscope with an improved lateral resolution is presented. The nanometer resolution XY stage is integrated into standard temporal phase shifting interferometer. The nanometer resolution XY stage is used to position specimen in subpixel of CCD detector, therefore CCD detectors sampling is improved. Two scanning algorithms and those simulation results are also presented. The simulation results show that scanning algorithms improve CCD detectors sampling significantly, and interferometeric microscopes lateral resolution is improved also.
Publisher
한국정밀공학회
Issue Date
1998-06
Language
Korean
Citation

한국정밀공학회지, v.15, no.6, pp.116 - 123

ISSN
1225-9071
URI
http://hdl.handle.net/10203/173673
Appears in Collection
ME-Journal Papers(저널논문)
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