정밀 스캐너를 이용한 간섭 현미경의 가로방향 분해능 향상

Abstract

An interferometric microscope with an improved lateral resolution is presented. The nanometer resolution XY stage is integrated into standard temporal phase shifting interferometer. The nanometer resolution XY stage is used to position specimen in subpixel of CCD detector, therefore CCD detectors sampling is improved. Two scanning algorithms and those simulation results are also presented. The simulation results show that scanning algorithms improve CCD detectors sampling significantly, and interferometeric microscopes lateral resolution is improved also.