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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Development of LIGA-like Process with Positive Photoresist & SU-8

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dc.contributor.authorLee, Seung Seob-
dc.contributor.authorLee, Y.S.-
dc.contributor.authorKim, J.H.-
dc.contributor.authorLee, S.W.-
dc.date.accessioned2013-03-29T19:10:09Z-
dc.date.available2013-03-29T19:10:09Z-
dc.date.created2012-10-30-
dc.date.issued2010-11-
dc.identifier.citationASME 2010 International Mechanical Engineering Congress & Exposition, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/173090-
dc.languageENG-
dc.titleDevelopment of LIGA-like Process with Positive Photoresist & SU-8-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameASME 2010 International Mechanical Engineering Congress & Exposition-
dc.identifier.conferencecountryCanada-
dc.contributor.localauthorLee, Seung Seob-
dc.contributor.nonIdAuthorLee, Y.S.-
dc.contributor.nonIdAuthorKim, J.H.-
dc.contributor.nonIdAuthorLee, S.W.-
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ME-Conference Papers(학술회의논문)
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