DC Field | Value | Language |
---|---|---|
dc.contributor.author | Son, Yong | - |
dc.contributor.author | Lim, Tae Woo | - |
dc.contributor.author | YANG DONG YOL | - |
dc.contributor.author | Prabhakaran, Prem | - |
dc.contributor.author | Lee, Kwang-Sup | - |
dc.date.accessioned | 2013-03-29T06:54:15Z | - |
dc.date.available | 2013-03-29T06:54:15Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2011-04 | - |
dc.identifier.citation | KMEMS, v., no., pp. - | - |
dc.identifier.uri | http://hdl.handle.net/10203/168825 | - |
dc.description.abstract | In this study, direct fabrication of metallic micro-patterns with a high spatial resolution is tried employing the two-photon induced photoreduction process. A metallic pattern is fabricated by means of photoreduction of the metallic solution using a femtosecond laser. The metallic solution is composed of metallic salt, and a polymer which serves a uniform arrangement of silver ions. For an efficient fabrication, continuous forming window is obtained and direct seed generation method is proposed, generating metallic nano-particles in the metallic solution. Through this work, precise silver lines and two dimensional micro-patterns with a minimum width of 400nm are fabricated using the developed process. | - |
dc.language | KOR | - |
dc.publisher | (사)마이크로나노시스템학회 | - |
dc.title | 금속이온과 나노입자를 함유한 수용액을 이용한 이광자 흡수 광환원 공정 정밀화에 관한 연구 | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | KMEMS | - |
dc.identifier.conferencecountry | South Korea | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | YANG DONG YOL | - |
dc.contributor.nonIdAuthor | Son, Yong | - |
dc.contributor.nonIdAuthor | Lim, Tae Woo | - |
dc.contributor.nonIdAuthor | Prabhakaran, Prem | - |
dc.contributor.nonIdAuthor | Lee, Kwang-Sup | - |
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