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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

A Stage based on Voice Coil Motor with High Speed and Long Range for Laser Micro/Nano Fabrication

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Gweon, Dae-Gabresearcher / Kihyun Kim / Hyun Soo Jung / Soo-Hun Lee / Min-Sung Hong / Moon G. Lee
Publisher
Trans Tech Publications Ltd.
Issue Date
2007-08
Language
English
Citation

Key Engineering Materials

ISSN
1013-9826
URI
http://hdl.handle.net/10203/16580
Appears in Collection
ME-Conference Papers(학술회의논문)
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