제진 테이블의 미진동 저감을 위한 PZT stack 가력기 기반 복합형 마운트 시스템

Abstract

This paper investigates the control performance of the proposed hybrid mount system for vibration isolation table. The hybrid mount system consists of an air spring as a passive device and a PZT stack actuator as an active device in series. The feasibility of the PZT stack actuator as an active actuator was examined through the simple experiments. After that, a series of numerical simulations were carried out to evaluate the control performance of the proposed hybrid mount system. The equations of motion of the table with a set of hybrid mount systems consisting of four devices are derived. The air spring is considered as a 1 spring and 1 dashpot elements, and PID control algorithm is adopted to estimate the control force. The results of the numerical simulations presents that the proposed hybrid mount system could be the promising control system for vibration isolation table.