분산 백색광 간섭계를 이용한 실시간 박막두께형상측정In-situ inspection of thin-film layers on patterned structures by dispersive white-light interferometry
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김영식 | - |
| dc.contributor.author | 김승우 | - |
| dc.date.accessioned | 2013-03-28T03:08:52Z | - |
| dc.date.available | 2013-03-28T03:08:52Z | - |
| dc.date.created | 2012-03-21 | - |
| dc.date.issued | 2007-02-08 | - |
| dc.identifier.citation | 한국광학회 2007년도 동계학술발표회 , v., no., pp.17 - 18 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/162460 | - |
| dc.language | KOR | - |
| dc.publisher | 한국광학회 | - |
| dc.title | 분산 백색광 간섭계를 이용한 실시간 박막두께형상측정 | - |
| dc.title.alternative | In-situ inspection of thin-film layers on patterned structures by dispersive white-light interferometry | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 17 | - |
| dc.citation.endingpage | 18 | - |
| dc.citation.publicationname | 한국광학회 2007년도 동계학술발표회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 김승우 | - |
| dc.contributor.nonIdAuthor | 김영식 | - |
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