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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Dispersive white-light interferometry for 3-D inspection of thin-film layers of flat panel displays

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dc.contributor.authorKim, Seung-Woo-
dc.contributor.authorY.S.Ghim-
dc.contributor.authorJ.You-
dc.date.accessioned2013-03-27T03:58:14Z-
dc.date.available2013-03-27T03:58:14Z-
dc.date.created2012-02-06-
dc.date.issued2007-
dc.identifier.citationProc.of SPIE, v., no., pp.6616 --
dc.identifier.urihttp://hdl.handle.net/10203/158867-
dc.languageENG-
dc.titleDispersive white-light interferometry for 3-D inspection of thin-film layers of flat panel displays-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage6616-
dc.citation.publicationnameProc.of SPIE-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorKim, Seung-Woo-
dc.contributor.nonIdAuthorY.S.Ghim-
dc.contributor.nonIdAuthorJ.You-
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ME-Conference Papers(학술회의논문)
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