DSpace at KOASAS
College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Precise thickness and composition control of multi-component thin films in ALP

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 282
  • Download : 0
Export
Chung H.-S. / Kang S.-W.researcher
Issue Date
2007-03-18
Language
ENG
Citation

6th International Conference on Semiconductor Technology, ISTC2007, pp.71 - 80

URI
http://hdl.handle.net/10203/157713
Appears in Collection
MS-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

Display Full Item Record

qr_code

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.


rss_1.0 rss_2.0 atom_1.0