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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Precise thickness and composition control of multi-component thin films in ALP

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Chung H.-S. / Kang S.-W.researcher
Issue Date
2007-03-18
Language
ENG
Citation

6th International Conference on Semiconductor Technology, ISTC2007, pp.71 - 80

URI
http://hdl.handle.net/10203/157713
Appears in Collection
MS-Conference Papers(학술회의논문)
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