Precise thickness and composition control of multi-component thin films in ALP
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Chung H.-S. | - |
| dc.contributor.author | Kang S.-W. | - |
| dc.date.accessioned | 2013-03-27T01:03:40Z | - |
| dc.date.available | 2013-03-27T01:03:40Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2007-03-18 | - |
| dc.identifier.citation | 6th International Conference on Semiconductor Technology, ISTC2007, v., no., pp.71 - 80 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/157713 | - |
| dc.language | ENG | - |
| dc.title | Precise thickness and composition control of multi-component thin films in ALP | - |
| dc.type | Conference | - |
| dc.identifier.scopusid | 2-s2.0-58449084111 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 71 | - |
| dc.citation.endingpage | 80 | - |
| dc.citation.publicationname | 6th International Conference on Semiconductor Technology, ISTC2007 | - |
| dc.identifier.conferencecountry | China | - |
| dc.identifier.conferencecountry | China | - |
| dc.contributor.localauthor | Kang S.-W. | - |
| dc.contributor.nonIdAuthor | Chung H.-S. | - |
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