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Cubic structured HfLaO dielectrics for MIM capacitor for RF IC applications

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Zhang, L. / He, W. / Chan, D.S.H. / Cho, Byung Jinresearcher
Issue Date
2009-05-24
Language
ENG
Citation

International Symposium on Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics - 215th Meeting of the Electrochemical Society, v.19, pp.615 - 623

URI
http://hdl.handle.net/10203/157287
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EE-Conference Papers(학술회의논문)
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