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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

SU-8 기반 LIGA 공정을 이용한 미세바늘 어레이의 제작

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김춘연 / 김용철 / 이승섭researcher
Issue Date
2007-04
Language
KOR
Citation

제9 회 한국 MEMS 학술대회

URI
http://hdl.handle.net/10203/156969
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ME-Conference Papers(학술회의논문)
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