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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

High resolution AFM Moire technique for the detection of defects in nano structure

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Park, JH / Lee, Soon-Bokresearcher
Issue Date
2007-11-19
Language
ENG
Citation

International Conference on Electronic Materials and Packaging 2007, EMAP 2007

URI
http://hdl.handle.net/10203/156849
Appears in Collection
ME-Conference Papers(학술회의논문)
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