DSpace at KOASAS: Effect of thermal annealing on the microstructural properties of Al-doped ZnO thin films grown on n-Si (100) substrates

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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Effect of thermal annealing on the microstructural properties of Al-doped ZnO thin films grown on n-Si (100) substrates

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Lee, Jeong Yong researcher / Han, JH / No, YS / Kim, TW / Kim, JY / Choi, WK

Issue Date: 2009-09-22

Language: ENG

Citation: 2nd International Conference on Microelectronics and Plasma Technology

URI: http://hdl.handle.net/10203/154870

Appears in Collection: MS-Conference Papers(학술회의논문)

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Effect of thermal annealing on the microstructural properties of Al-doped ZnO thin films grown on n-Si (100) substrates

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