MEMS variable capacitor actuated with an electrically floating plate
- Issue Date
- 2007-12-10
- Language
- ENG
- Citation
2007 IEEE International Electron Devices Meeting, IEDM, pp.431 - 434
- ISSN
- 0163-1918
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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