Maneuvering pull-in voltage of an electrostatic micro-switch by introducing a pre-charged electrode

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Issue Date
2007-12-10
Language
ENG
Citation

2007 IEEE International Electron Devices Meeting, IEDM, pp.439 - 442

ISSN
0163-1918
URI
http://hdl.handle.net/10203/154557
Appears in Collection
EE-Conference Papers(학술회의논문)
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