DC Field | Value | Language |
---|---|---|
dc.contributor.author | Oh, JS | - |
dc.contributor.author | Bae, ED | - |
dc.contributor.author | Kim, Seung-Woo | - |
dc.date.accessioned | 2013-03-18T21:09:30Z | - |
dc.date.available | 2013-03-18T21:09:30Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2004-06 | - |
dc.identifier.citation | JSPE, v., no., pp.231 - 233 | - |
dc.identifier.uri | http://hdl.handle.net/10203/152457 | - |
dc.language | ENG | - |
dc.title | The Analysis and Compensation of 2D Position Error in Scanning Type XY Stage | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 231 | - |
dc.citation.endingpage | 233 | - |
dc.citation.publicationname | JSPE | - |
dc.contributor.localauthor | Kim, Seung-Woo | - |
dc.contributor.nonIdAuthor | Oh, JS | - |
dc.contributor.nonIdAuthor | Bae, ED | - |
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