분산형 백색광 간섭계를 이용한 미세 박막 구조물의 삼차원 두께형상 및 굴절률의 실시간 측정
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김영식 | - |
| dc.contributor.author | 김승우 | - |
| dc.date.accessioned | 2013-03-18T21:04:57Z | - |
| dc.date.available | 2013-03-18T21:04:57Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2006-05 | - |
| dc.identifier.citation | 한국정밀공학회 2006년도 춘계학술대회, v., no., pp.23 - 24 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/152430 | - |
| dc.description.abstract | We present a dispersive scheme of white-light interferometry that enables not only to perform tomographical measurements of thin-film layers but also to measure a refractive index without mechanical depth scanning. The interferometry is found useful particularly for in-situ 3-D inspection of micro-engineered surfaces such as liquid crystal displays, semi-conductor and MEMS structure, which requires for high-speed implementation of 3-D surface metrology. | - |
| dc.language | KOR | - |
| dc.publisher | 한국정밀공학회 | - |
| dc.title | 분산형 백색광 간섭계를 이용한 미세 박막 구조물의 삼차원 두께형상 및 굴절률의 실시간 측정 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 23 | - |
| dc.citation.endingpage | 24 | - |
| dc.citation.publicationname | 한국정밀공학회 2006년도 춘계학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 김승우 | - |
| dc.contributor.nonIdAuthor | 김영식 | - |
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