분산형 백색광 간섭계를 이용한 미세 박막 구조물의 삼차원 두께형상 및 굴절률의 실시간 측정

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dc.contributor.author김영식-
dc.contributor.author김승우-
dc.date.accessioned2013-03-18T21:04:57Z-
dc.date.available2013-03-18T21:04:57Z-
dc.date.created2012-02-06-
dc.date.issued2006-05-
dc.identifier.citation한국정밀공학회 2006년도 춘계학술대회, v., no., pp.23 - 24-
dc.identifier.urihttp://hdl.handle.net/10203/152430-
dc.description.abstractWe present a dispersive scheme of white-light interferometry that enables not only to perform tomographical measurements of thin-film layers but also to measure a refractive index without mechanical depth scanning. The interferometry is found useful particularly for in-situ 3-D inspection of micro-engineered surfaces such as liquid crystal displays, semi-conductor and MEMS structure, which requires for high-speed implementation of 3-D surface metrology.-
dc.languageKOR-
dc.publisher한국정밀공학회-
dc.title분산형 백색광 간섭계를 이용한 미세 박막 구조물의 삼차원 두께형상 및 굴절률의 실시간 측정-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage23-
dc.citation.endingpage24-
dc.citation.publicationname한국정밀공학회 2006년도 춘계학술대회-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthor김승우-
dc.contributor.nonIdAuthor김영식-
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ME-Conference Papers(학술회의논문)
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