점회절 구면파의 전단 간섭계를 이용한 절대위치 측정Absolute position measurement by lateral shearing interferometry of point-diffracted spherical waves

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dc.contributor.author주지영-
dc.contributor.author김승우-
dc.date.accessioned2013-03-18T21:04:08Z-
dc.date.available2013-03-18T21:04:08Z-
dc.date.created2012-02-06-
dc.date.issued2006-05-
dc.identifier.citation한국정밀공학회 2006년도 춘계학술대회 , v.6, no., pp.25 - 26-
dc.identifier.urihttp://hdl.handle.net/10203/152425-
dc.description.abstractThe method measuring the absolute position of a point diffraction source emitting a spherical wavefront in three-dimension is proposed. Two-dimensional interference of spherical wavefronts is used to overcome ambiguity of phase order. The spherical wavefront is explicated by Taylor series expansion, from which a radius of curvature of a spherical wavefront and its center position in three-dimension are obtainable. The spherical wavefront is reconstructed by a modified lateral shearing interferometer, which uses single-mode fiber as a point diffraction source.-
dc.languageKOR-
dc.publisher한국정밀공학회-
dc.title점회절 구면파의 전단 간섭계를 이용한 절대위치 측정-
dc.title.alternativeAbsolute position measurement by lateral shearing interferometry of point-diffracted spherical waves-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.volume6-
dc.citation.beginningpage25-
dc.citation.endingpage26-
dc.citation.publicationname한국정밀공학회 2006년도 춘계학술대회-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthor김승우-
dc.contributor.nonIdAuthor주지영-
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ME-Conference Papers(학술회의논문)
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