DC Field | Value | Language |
---|---|---|
dc.contributor.author | 오정석 | - |
dc.contributor.author | 김승우 | - |
dc.date.accessioned | 2013-03-18T20:54:23Z | - |
dc.date.available | 2013-03-18T20:54:23Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2005 | - |
dc.identifier.citation | 한국정밀공학회 2005년도 추계학술대회 , v.5, no., pp.204 - 207 | - |
dc.identifier.uri | http://hdl.handle.net/10203/152350 | - |
dc.description.abstract | We discuss two possibilities of using femtosecond pulse lasers as a new interferometric light source fer enhanced precision surface profile metrology. First, a train of ultra-fast laser pulses yields repeated low temporal coherence, which allows performing unequal-path scanning interferometry that is not feasible with white light. Second, high spatial coherence of femtosecond pulse lasers enables to test large size optics in non-symmetric configurations with relatively small size reference surfaces. These two advantages are verified experimentally using Fizeau and Twyman-Green type scanning interferometers. | - |
dc.language | KOR | - |
dc.publisher | 한국정밀공학회 | - |
dc.title | 펨토초 레이저를 이용한 비동일 광경로 저결맞음 간섭계 | - |
dc.title.alternative | Unequal-path Low-coherence Interferometry Using Femtosecond Pulse Lasers | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.volume | 5 | - |
dc.citation.beginningpage | 204 | - |
dc.citation.endingpage | 207 | - |
dc.citation.publicationname | 한국정밀공학회 2005년도 추계학술대회 | - |
dc.identifier.conferencecountry | South Korea | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | 김승우 | - |
dc.contributor.nonIdAuthor | 오정석 | - |
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