층밀림 간섭계를 이용한 부피간섭계의 개선

Abstract

The volumetric interferometer, which uses the interference of wavefronts emitted from two single mode fibers, measures the target position in 3-D. In this paper, we suggest a new calculation method which doesn't need a non-linear optimization and an initial guess. We find the relationship between the coefficients of the Zernike polynomials for a spherical wavefront and its center and reconstruct a spherical wavefront by using the Zernike polynomials from two interference fringes like a lateral shearing interferometer. The target position can be obtained from the coefficients of the Zernike polynomials of the reconstructed wavefront. We can get the target position in 3-D with $sub-{\mu}m$ errors in a simulation.