나노프로브에서의 전기장 분포에 관한 연구

Abstract

In this work, a study on the energy distribution of short pulses at near field was performed for nano-scale processing. The finite-difference-time-domain (FDTD) method was employed to simulate the energy distribution in near field. The simulation was executed for NSOM tip with aperture and femto-second laser (λ=800㎚). The simulation results show that the energy distribution is a function of the tapered angle, the diameter of the aperture and the coating material of the tip. The intensity of laser energy behind the aperture decreases exponentially with increasing distance from the aperture, while the full width at half maximum is also expanded.