나노 복화(複畵)공정을 이용한 직접적 패터닝에 관한 연구Direct Patterning on Glass Plate using a Nano Replication Printing(nRP) Process

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dc.contributor.author박상후-
dc.contributor.author임태우-
dc.contributor.author양동열-
dc.contributor.author이신욱-
dc.contributor.author공홍진-
dc.date.accessioned2013-03-18T20:00:37Z-
dc.date.available2013-03-18T20:00:37Z-
dc.date.created2012-02-06-
dc.date.issued2003-
dc.identifier.citation대한기계학회 생산 및 설계부문 학술대회, v., no., pp.0 - 0-
dc.identifier.urihttp://hdl.handle.net/10203/151950-
dc.description.abstractA method of patterning submicron detailed figures, called as a nano replication printing (nRP), with two-photon-absorbed polymerization initiated by a femtosecond Ti:sapphire laser is proposed. In this method, the laser is scanned on a photosensitive urethane acrylate monomer resin, to induce photo-polymerization by two photon absorption along the rows of a voxel matrix transformed from a bitmap picture. The replicated figures with various dimensions, including sizes down to ~ 15 ㎛, can be fabricated experimentally with edge resolution of around 200㎚. Through the nRP process, the nano/micro-scaled direct patterning without any mask using a black-and-white type of bitmap file can be technologically feasible. The effectiveness of the proposed process has been verified by pattering several figures.-
dc.languageKOR-
dc.publisher대한기계학회-
dc.title나노 복화(複畵)공정을 이용한 직접적 패터닝에 관한 연구-
dc.title.alternativeDirect Patterning on Glass Plate using a Nano Replication Printing(nRP) Process-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage0-
dc.citation.endingpage0-
dc.citation.publicationname대한기계학회 생산 및 설계부문 학술대회-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthor양동열-
dc.contributor.nonIdAuthor박상후-
dc.contributor.nonIdAuthor임태우-
dc.contributor.nonIdAuthor이신욱-
dc.contributor.nonIdAuthor공홍진-
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ME-Conference Papers(학술회의논문)
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