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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

스퍼터링으로 증착한 Cr박막과 CoX(X=CrPtTa)/Cr 다층 박막의 표면응력변화 실시간 측정

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배형빈 / 박중근researcher / 하걸욱
Publisher
대한금속재료학회
Issue Date
2004-10
Language
Korean
Citation

대한금속재료학회 추계대회

URI
http://hdl.handle.net/10203/151396
Appears in Collection
MS-Conference Papers(학술회의논문)
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