Thermal decomposition of Ru(EtCp)2 and metallorganic chemical vapor deposition of Ruthenium thin films using Ru(EtCp)2
- Publisher
- ECS
- Issue Date
- 2003-04-28
- Language
- ENG
- Citation
203rd Meeting of The Electrochemical Society, v.0, no.0, pp.0 - 0
- Appears in Collection
- MS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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