Showing results 1 to 2 of 2
Makespan Analysis of Lot Switching Period in Cluster Tools Lee, Jun-Ho; Kim, Hyunjung, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.29, no.2, pp.127 - 136, 2016-05 |
Scheduling cluster tools for concurrent processing of multiple wafer types = 복수 웨이퍼 혼류생산을 위한 클러스터 장비 스케줄링link Lee, Jun-Ho; 이준호; et al, 한국과학기술원, 2013 |
Discover