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Showing results 1 to 7 of 7

1
Analysis of Backward Sequence for Single-Armed Cluster Tools With Processing Time Variations

Lee, Jun-Ho; Kim, Jun-Ho, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.17, no.4, pp.2167 - 2174, 2020-10

2
Closed-Form Expressions on Lot Completion Time for Dual-Armed Cluster Tools With Parallel Processing Modules

Kim, Hyunjung; Lee, Jun-Ho, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.16, no.2, pp.898 - 907, 2019-04

3
Completion Time Analysis of Wafer Lots in Single-Armed Cluster Tools With Parallel Processing Modules

Lee, Jun-Ho; Kim, Hyunjung, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.14, no.4, pp.1622 - 1633, 2017-10

4
Feedback Control of Cluster Tools for Regulating Wafer Delays

Kim, Chulhan; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1189 - 1199, 2016-04

5
Makespan Analysis of Lot Switching Period in Cluster Tools

Lee, Jun-Ho; Kim, Hyunjung, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.29, no.2, pp.127 - 136, 2016-05

6
The Impact of Processing Time Variations on Swap Sequence Performance in Dual-Armed Cluster Tools

Lee, Jun-Ho; Kim, Hyun-Jung, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.20, no.4, pp.2668 - 2677, 2023-10

7
Wafer Delay Analysis and Workload Balancing of Parallel Chambers for Dual-Armed Cluster Tools With Multiple Wafer Types

Ko, Sung-Gil; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.18, no.3, pp.1516 - 1526, 2021-07

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