DSpace at KOASAS
Browsing DSpace

Browse "Dept. of Industrial and Systems Engineering(산업및시스템공학과)" by Subject Cluster Tool▼aScheduling▼aMultiple Wafer Types▼aConcurrent Processing▼aChamber Sharing▼aWorkload Balancing▼aWafer Delay▼aTime Constraint

A to Z

All 0-9

A B C D E F G H I J K L M N O P Q R S T U V W X Y Z

or enter first few letters:

Showing results 1 to 1 of 1

1
Scheduling cluster tools for concurrent processing of multiple wafer types with identical job flows = 동일한 작업 흐름을 갖는 복수 웨이퍼 타입의 혼류 생산을 위한 클러스터 장비 스케줄링link

Ko, Sung-Gil; Lee, Tae-Eog; et al, 한국과학기술원, 2018

Discover

rss_1.0 rss_2.0 atom_1.0