학위논문(박사) - 한국과학기술원 : 산업및시스템공학과, 2018.2,[v, 93 p. :]
Cluster Tool▼aScheduling▼aMultiple Wafer Types▼aConcurrent Processing▼aChamber Sharing▼aWorkload Balancing▼aWafer Delay▼aTime Constraint; 클러스터 장비▼a복수 웨이퍼 타입▼a스케줄링▼a혼류생산▼a병렬챔버▼a워크로드 균형▼a시간제약
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