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Showing results 1 to 10 of 10

1
Adaptive Scheduling of Cluster Tools With Wafer Delay Constraints and Process Time Variation

Lim, Yuchul; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.17, no.1, pp.375 - 388, 2020-01

2
Cleaning Plan Optimization for Dual-Armed Cluster Tools With General Chamber Cleaning Periods

Lee, Tae-Gyung; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.20, no.3, pp.1890 - 1906, 2023-07

3
Feedback Control of Cluster Tools: Stability Against Random Time Disruptions

Kim, Chulhan; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.19, no.3, pp.2008 - 2015, 2022-07

4
Integrated Scheduling of a Dual-Armed Cluster Tool for Maximizing Steady Schedule Patterns

Kim, Woojin; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON SYSTEMS, MAN, AND CYBERNETICS: SYSTEMS, v.51, no.12, pp.7282 - 7294, 2021-12

5
Reachability Tree-Based Optimization Algorithm for Cyclic Scheduling of Timed Petri Nets

Kim, Chulhan; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.18, no.3, pp.1441 - 1452, 2021-07

6
Scheduling cluster tools with chamber cleaning for semiconductor manufacturing = 챔버 클리닝을 고려한 반도체 제조용 클러스터 장비의 스케줄링link

Yu, Tae-Sun; 유태선; et al, 한국과학기술원, 2017

7
Scheduling Dual-Armed Cluster Tools for Concurrent Processing of Multiple Wafer Types With Identical Job Flows

Ko, Sung-Gil; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.16, no.3, pp.1058 - 1070, 2019-07

8
TWO-STAGE LOT SCHEDULING WITH WAITING TIME CONSTRAINTS AND DUE DATES

Yu, Tae-Sun; Kim, Hyun-Jung; Jung, Chanwhi; Lee, Tae-Eog, Winter Simulation Conference on Simulation - Making Decisions in a Complex World, pp.3630 - 3641, IEEE, 2013-12-09

9
Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations

Yu, Tae-Sun; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.58, no.2, pp.434 - 447, 2020-01

10
Wafer Delay Analysis and Workload Balancing of Parallel Chambers for Dual-Armed Cluster Tools With Multiple Wafer Types

Ko, Sung-Gil; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.18, no.3, pp.1516 - 1526, 2021-07

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