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Browse "Dept. of Industrial and Systems Engineering(산업및시스템공학과)" by Subject semiconductor manufacturing

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Showing results 21 to 24 of 24

21
Variational Deep Clustering of Wafer Map Patterns

Hwang, Jonghyun; Kim, Heeyoung, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.33, no.3, pp.466 - 475, 2020-08

22
Virtual control - A virtual cluster tool for testing and verifying a cluster tool controller and a scheduler

Joo, YJ; Lee, Tae-Eog, IEEE ROBOTICS & AUTOMATION MAGAZINE, v.11, no.3, pp.33 - 49, 2004-09

23
Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations

Yu, Tae-Sun; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.58, no.2, pp.434 - 447, 2020-01

24
Wafer Delay Analysis and Workload Balancing of Parallel Chambers for Dual-Armed Cluster Tools With Multiple Wafer Types

Ko, Sung-Gil; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.18, no.3, pp.1516 - 1526, 2021-07

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