대면적 미세형상 공작물 셋업 보정을 위한 3자유도(Z-translation,Pitch,Rollmotion) 초정밀 tilt table 설계
- Publisher
- 한국공작기계학회
- Issue Date
- 2006
- Language
- KOR
- Citation
한국공작기계학회 추계학술대회, pp.28 - 33
- Appears in Collection
- ME-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.