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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Fabrication of nano-and micro-scale UV imprint stamp using diamond-like carbon coating technology

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dc.contributor.authorLEE, ES-
dc.contributor.authorJEONG, JH-
dc.contributor.authorKIM, KD-
dc.contributor.authorPARK, SH-
dc.contributor.authorLIM,TW-
dc.contributor.authorYang, Dong-Yol-
dc.contributor.authorCHA, NG-
dc.date.accessioned2013-03-18T13:13:54Z-
dc.date.available2013-03-18T13:13:54Z-
dc.date.created2012-02-06-
dc.date.issued2005-
dc.identifier.citation4th Int. Conf. on Nanoimprint and Nanoprint technology, v.6, no.11, pp.3619 - 3623-
dc.identifier.urihttp://hdl.handle.net/10203/148696-
dc.languageENG-
dc.publisher4th Int. Conf. on Nanoimprint and Nanoprint technology-
dc.titleFabrication of nano-and micro-scale UV imprint stamp using diamond-like carbon coating technology-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.volume6-
dc.citation.issue11-
dc.citation.beginningpage3619-
dc.citation.endingpage3623-
dc.citation.publicationname4th Int. Conf. on Nanoimprint and Nanoprint technology-
dc.contributor.localauthorYang, Dong-Yol-
dc.contributor.nonIdAuthorLEE, ES-
dc.contributor.nonIdAuthorJEONG, JH-
dc.contributor.nonIdAuthorKIM, KD-
dc.contributor.nonIdAuthorPARK, SH-
dc.contributor.nonIdAuthorLIM,TW-
dc.contributor.nonIdAuthorCHA, NG-
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ME-Conference Papers(학술회의논문)
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