Compensation of out-of-plane error of XY stage based on self-calibration method
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Yoo, S | - |
| dc.contributor.author | Kim, Seung-Woo | - |
| dc.date.accessioned | 2013-03-18T10:01:32Z | - |
| dc.date.available | 2013-03-18T10:01:32Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2003-11-27 | - |
| dc.identifier.citation | 한국정밀공학회 한일심포지엄, v., no., pp.301 - 307 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/147214 | - |
| dc.language | ENG | - |
| dc.title | Compensation of out-of-plane error of XY stage based on self-calibration method | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 301 | - |
| dc.citation.endingpage | 307 | - |
| dc.citation.publicationname | 한국정밀공학회 한일심포지엄 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Kim, Seung-Woo | - |
| dc.contributor.nonIdAuthor | Yoo, S | - |
- Appears in Collection
- ME-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.