Fabrication of a ZnO Piezoelectric Cantilever with a High Aspect-Ratio Nano Tip

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Issue Date
2003-01
Language
ENG
Citation

16th IEEE Int. Conf. Micro Electro Mechanical System (MEMS’03)

URI
http://hdl.handle.net/10203/147047
Appears in Collection
ME-Conference Papers(학술회의논문)
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