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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

웨이퍼 단위 공정에의 적용을 위한 PDMS 수축률의 실험적 연구

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Issue Date
2005
Language
KOR
Citation

제7회 한국 MEMS 학술대회

URI
http://hdl.handle.net/10203/146108
Appears in Collection
ME-Conference Papers(학술회의논문)
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