DSpace at KOASAS: Metal gate/high-K dielectric stack on Si cap/ultra-thin pure Ge epi/Si substrate

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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Metal gate/high-K dielectric stack on Si cap/ultra-thin pure Ge epi/Si substrateMetal gate/high-K dielectric stack on Si cap/ultra-thin pure Ge epi/Si substrate

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Cho, Byung Jin researcher / Yeo, CC / Lee, MH / Liu, CW / Choi, KJ / Lee, TW

Issue Date: 2005-12-08

Language: ENG

Citation: Proceedings on 2005 IEEE Conference on Electron Devices and Solid-State Circuits, pp.107 - 110

URI: http://hdl.handle.net/10203/145441

Appears in Collection: EE-Conference Papers(학술회의논문)

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