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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

MEMS process 비용 절감을 위한 두꺼운 포토레지스트에서 완전한 에지 비드 효과 방지

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이병철 / 장성일 / 윤준보researcher
Issue Date
2006-04-06
Language
KOR
Citation

제8회 한국MEMS 학술대회, pp.528 - 532

URI
http://hdl.handle.net/10203/145154
Appears in Collection
EE-Conference Papers(학술회의논문)
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