Synthesis of norbornene copolymers with diazo groups and their application as DUV resists
- Issue Date
- 2003-02-24
- Language
- ENG
- Citation
Advances in Resist Technology and Processing XX, pp.655 - 664
- Appears in Collection
- CH-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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