DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Jin-Baek | - |
dc.contributor.author | Kim, Kyoung-Seon | - |
dc.date.accessioned | 2013-03-18T02:13:22Z | - |
dc.date.available | 2013-03-18T02:13:22Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2003-02-24 | - |
dc.identifier.citation | Advances in Resist Technology and Processing XX, v., no., pp.655 - 664 | - |
dc.identifier.uri | http://hdl.handle.net/10203/143890 | - |
dc.language | ENG | - |
dc.title | Synthesis of norbornene copolymers with diazo groups and their application as DUV resists | - |
dc.type | Conference | - |
dc.identifier.scopusid | 2-s2.0-0141723288 | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 655 | - |
dc.citation.endingpage | 664 | - |
dc.citation.publicationname | Advances in Resist Technology and Processing XX | - |
dc.identifier.conferencecountry | United States | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Kim, Jin-Baek | - |
dc.contributor.nonIdAuthor | Kim, Kyoung-Seon | - |
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