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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Design and Evaluation of Two Dimensional Metrological Atomic Force Microscope using a Planar Nanoscanner

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dc.contributor.authorLee, DY-
dc.contributor.authorKim, DM-
dc.contributor.authorGweon, Dae-Gab-
dc.date.accessioned2013-03-17T23:33:22Z-
dc.date.available2013-03-17T23:33:22Z-
dc.date.created2012-02-06-
dc.date.issued2005-07-08-
dc.identifier.citation13th International Conference, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/142871-
dc.languageENG-
dc.titleDesign and Evaluation of Two Dimensional Metrological Atomic Force Microscope using a Planar Nanoscanner-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationname13th International Conference-
dc.identifier.conferencecountryJapan-
dc.identifier.conferencecountryJapan-
dc.contributor.localauthorGweon, Dae-Gab-
dc.contributor.nonIdAuthorLee, DY-
dc.contributor.nonIdAuthorKim, DM-
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ME-Conference Papers(학술회의논문)
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