State-of-the-art of the laser interferometers for displacement measurement

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dc.contributor.authorOh, J.S.-
dc.contributor.authorKim, Seung-Woo-
dc.date.accessioned2013-03-17T09:58:33Z-
dc.date.available2013-03-17T09:58:33Z-
dc.date.created2012-02-06-
dc.date.issued2003-
dc.identifier.citationProceedings of Korea-Japan Joint Symposium on Nanoengineering 2003, v., no., pp.107 - 107-
dc.identifier.urihttp://hdl.handle.net/10203/142211-
dc.languageENG-
dc.titleState-of-the-art of the laser interferometers for displacement measurement-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage107-
dc.citation.endingpage107-
dc.citation.publicationnameProceedings of Korea-Japan Joint Symposium on Nanoengineering 2003-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthorKim, Seung-Woo-
dc.contributor.nonIdAuthorOh, J.S.-
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ME-Conference Papers(학술회의논문)
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