A high fill-factor micro-mirror stacked on a crossbar torsion spring for electrostatically-actuated two-axis operation in large-scale optical switch
- Issue Date
- 2003-01-19
- Language
- ENG
- Citation
IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, pp.259 - 262
- Appears in Collection
- EE-Conference Papers(학술회의논문)RIMS Conference Papers
- Files in This Item
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