비구면 렌즈의 형상 측정을 위한 접촉식 프로브 기술 개발Contact Probing Technique for Profile Measurement of Aspheric Lenses

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dc.contributor.author유승봉-
dc.contributor.author장인철-
dc.contributor.author김승우-
dc.date.accessioned2013-03-16T23:59:30Z-
dc.date.available2013-03-16T23:59:30Z-
dc.date.created2012-02-06-
dc.date.issued2000-
dc.identifier.citation한국정밀공학회 2000년 춘계학술대회 , v., no., pp.603 - 606-
dc.identifier.urihttp://hdl.handle.net/10203/137534-
dc.description.abstractThis dissertation is concerned with ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a leaf spring mechanism and a capacitive-type sensor. The contact probe is attached on the z-axis during measurement while aspheric objects are supported on an precision xy-stage whose lateral motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed in this investigation is capable of providing a repeatability of 50 nanometers with a ±3σ uncertainty of 300 nanometers. Thermal disturbance is found the most significant factor that should be precisely controlled for accurate measurement.-
dc.languageKOR-
dc.publisher한국정밀공학회-
dc.title비구면 렌즈의 형상 측정을 위한 접촉식 프로브 기술 개발-
dc.title.alternativeContact Probing Technique for Profile Measurement of Aspheric Lenses-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage603-
dc.citation.endingpage606-
dc.citation.publicationname한국정밀공학회 2000년 춘계학술대회-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthor김승우-
dc.contributor.nonIdAuthor유승봉-
dc.contributor.nonIdAuthor장인철-
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ME-Conference Papers(학술회의논문)
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