Deep X-ray 경사공정을 이용한 초소형 삼면 반사체 제작

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dc.contributor.author오동영-
dc.contributor.author이승섭-
dc.contributor.author정동관-
dc.date.accessioned2013-03-16T21:03:42Z-
dc.date.available2013-03-16T21:03:42Z-
dc.date.created2012-02-06-
dc.date.issued2000-
dc.identifier.citation제 2회 MEMS 학술대회, v., no., pp.185 - 190-
dc.identifier.urihttp://hdl.handle.net/10203/135827-
dc.languageKOR-
dc.publisher대한기계학회-
dc.titleDeep X-ray 경사공정을 이용한 초소형 삼면 반사체 제작-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage185-
dc.citation.endingpage190-
dc.citation.publicationname제 2회 MEMS 학술대회-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthor이승섭-
dc.contributor.nonIdAuthor오동영-
dc.contributor.nonIdAuthor정동관-
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ME-Conference Papers(학술회의논문)
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