헤테로다인 변위 측정 간섭계의 고속, 고분해능 위상 측정High-speed, High-resolution Phase Measuring Technique for Heterodyne Displacement Measuring Interferometers
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김민석 | - |
| dc.contributor.author | 김승우 | - |
| dc.date.accessioned | 2013-03-16T20:32:26Z | - |
| dc.date.available | 2013-03-16T20:32:26Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2002-05 | - |
| dc.identifier.citation | 한국정밀공학회 2002년도 춘계학술대회 , v., no., pp.203 - 206 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/135520 | - |
| dc.language | KOR | - |
| dc.publisher | 한국정밀공학회 | - |
| dc.title | 헤테로다인 변위 측정 간섭계의 고속, 고분해능 위상 측정 | - |
| dc.title.alternative | High-speed, High-resolution Phase Measuring Technique for Heterodyne Displacement Measuring Interferometers | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 203 | - |
| dc.citation.endingpage | 206 | - |
| dc.citation.publicationname | 한국정밀공학회 2002년도 춘계학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 김승우 | - |
| dc.contributor.nonIdAuthor | 김민석 | - |
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