A Precision 3-axis stage for AFM scanner
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Shim, J-Y | - |
| dc.contributor.author | Chung, H-W | - |
| dc.contributor.author | Gweon, Dae-Gab | - |
| dc.date.accessioned | 2013-03-16T16:57:26Z | - |
| dc.date.available | 2013-03-16T16:57:26Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1999 | - |
| dc.identifier.citation | Int. Conf. on Mechatronic Technology, v., no., pp.341 - 344 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/133484 | - |
| dc.language | ENG | - |
| dc.title | A Precision 3-axis stage for AFM scanner | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 341 | - |
| dc.citation.endingpage | 344 | - |
| dc.citation.publicationname | Int. Conf. on Mechatronic Technology | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Gweon, Dae-Gab | - |
| dc.contributor.nonIdAuthor | Shim, J-Y | - |
| dc.contributor.nonIdAuthor | Chung, H-W | - |
- Appears in Collection
- ME-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.