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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

A new design and kinematic analysis of 3-axis motion stage for ellipsometer

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dc.contributor.authorJeong, J-H-
dc.contributor.authorPark, S-L-
dc.contributor.authorSeo, J-W-
dc.contributor.authorGweon, Dae-Gab-
dc.date.accessioned2013-03-16T16:45:24Z-
dc.date.available2013-03-16T16:45:24Z-
dc.date.created2012-02-06-
dc.date.issued1999-10-
dc.identifier.citationInt. Conf. on Mechatronic Technology, v., no., pp.327 - 329-
dc.identifier.urihttp://hdl.handle.net/10203/133376-
dc.languageENG-
dc.titleA new design and kinematic analysis of 3-axis motion stage for ellipsometer-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage327-
dc.citation.endingpage329-
dc.citation.publicationnameInt. Conf. on Mechatronic Technology-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthorGweon, Dae-Gab-
dc.contributor.nonIdAuthorJeong, J-H-
dc.contributor.nonIdAuthorPark, S-L-
dc.contributor.nonIdAuthorSeo, J-W-
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ME-Conference Papers(학술회의논문)
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