간섭무늬 최대점 이동량의 감지를 이용한 초정밀 변위 측정 시스템

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Issue Date
2001-06-01
Language
KOR
Citation

한국정밀공학회, pp.80 - 86

URI
http://hdl.handle.net/10203/131363
Appears in Collection
ME-Conference Papers(학술회의논문)
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